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XCS Series High-Precision 3D Laser Profile Sensor for High-Speed Measurement

  • Unique 3D scan results without occlusion due to dual-head option and extremely high resolution
  • 3D laser profile sensor with high precision and repeatability thanks to high-quality laser line projection
  • Unrivaled optical resolution for electronic inspection (e.g. BGA inspection) with a field of view of up to 53 mm
  • Highest inspection speed available with 3070 WARP sensor

C6 XCS 3070 (1 Gbit/s)

C6 XCS 3070 Single
C6 XCS 3070 Dual

High-Precision 3D Laser Profile Sensors for the Electronics Industry

With the 3D laser profile sensor from the XCS series, AT Sensors offers a product that is particularly suitable for high-performance applications in the electronics industry thanks to its enormous precision and extreme speed.
The 3D laser profile sensor is characterized by an optimized laser with homogeneous thickness along the laser line, which guarantees precise detection of even the smallest structures.

This enables high-precision inspection applications with high repeatability, which is ideal for the inspection of ball grid arrays (BGAs), among other things. The innovative clean beam function protects the laser from external interference and ensures a uniform intensity distribution, which further increases reliability. The sensor’s dual-head option eliminates occlusions and achieves profile speeds of up to 140 kHz with the 3070 WARP version, speeding up data analysis and increasing efficiency.

Application Recommendation

  • Electronics & Semicon
  • eMobility & Battery
  • Automotive Metrology
  • Industrial Automation
  • Welding
  • Pharmaceuticals
  • Wood & Lumber

C7 XCS 3070 (5 Gbit/s)

C7 XCS 3070 5 Gbit/s Sensor
C7 XCS 3070 Sensor Housing

Ultra-High Resolution 3D Laser Profile Sensors for Advanced Electronics Inspection

With the new C7 XCS 3070, AT Sensors expands the XCS series with its first compact 3D laser profile sensor featuring a 5 Gbit/s interface.
The newly developed model is designed for demanding high-resolution inspection tasks where extremely fine structures need to be captured with high precision and speed.

Thanks to its high-precision, ultra-thin 405 nm laser line and an X-resolution of 7.8 µm, the C7 XCS 3070 closes the gap in applications requiring particularly high lateral resolution.
It is especially suitable for electronics, semiconductor and other precision inspection applications where small details, fine edges and minimal height differences must be measured reliably.

The sensor is available as 3070 and 3070 WARP version and combines compact design, high data throughput and excellent measurement performance in a newly developed housing.

Benefits

  • 5 Gbit/s high-speed interface
  • Ultra-high lateral resolution (7.8 µm)
  • High-precision 405 nm laser optics
  • Available as 3070 and 3070 WARP version
  • Newly developed compact housing
  • Designed for advanced electronics and semiconductor inspection

Technical Highlights

  • X-field of view: 24 mm
  • Z-field of view: 6 mm
  • X-resolution: 7.8 µm
  • Z-resolution: 0.13 µm
  • Laser wavelength: 405 nm
  • Laser class: 3R

Application Recommendation

  • Inspection of AI Chips
  • Coplanarity Check
  • BGA Inspection
  • Advanced Packaging

General technical data for all XCS Models

Interface Gigabit-Ethernet (1GigE)
Inputs Encoder A+, A -, B+, B -, Z+, Z- (TTL Level)
Two freely configurable digital inputs (+5 to +24 VDC)
Outputs Two freely configurable digital outputs (+5 to +24 VDC)
Power Supply Sensor supply +10 to +24 VDC (max. +27 VDC )
Laser supply +10 to +24 VDC
Housing Anodized aluminum , IP67
Environmental Conditions GigE Vision with GenICam
Vibration/Shock Vibration resistance (sinusoidal): DIN EN 60068-2-6: 2008-10: 2g, 10-150 Hz
Vibration resistance (random): DIN EN 60068-2-64: 2020-09: 7g, 10-500 Hz
Shock resistance: DIN EN 60068-2-27: 2010-02: 15g, 3ms
Standards GenICam, GigE Vision
Features Automatic RegionTracking, Automatic RegionSearch, Multiple Regions, MultiPart, AutoStart, History Buffer, Multi-Slope, MultiPeak

Laser specifications for all XCS Models

Laser Wavelength 405 nm
Laser Class 3R

Optical Setup

3070 / 3070W 4090
Lateral Resolution X 0,0156 mm 0,01301 mm
Height Resolution Z 0,5 µm (with 6 subpixels) 0,42 µm (with 6 subpixels)
Working Distance 146 mm 146 mm
Nominal Triangulation Angle 28 °  28 °
Profile Resolution 3072 Pixel per Profile 4096 Pixel per Profile
Max. Profile Speed 140 kHz  140 kHz
Z-Range Near / Far 10 mm 5 mm

Sensors in Comparison

C6-3070 C6-3070W C6-4090
Sensor Type CMOS
Shutter Type Global shutter
Resolution (H xV) 3072 x 1020 Pixel 3072 x 1020 Pixel 4096 x 3072 Pixel
Pixel Size 6.6 µm x 6.6 µm 6.6 µm x 6.6 µm 5.5 µm x 5.5 µm
Sensor Size 20,275 mm x 6,632 mm 20,275 mm x 6,732 mm 22,528 mm x 16,896 mm
Image Circle 21,37 mm 21,37 mm 28,16 mm
Sensor Format 1,5″ 1,5″ 1,75″
Power Consumption max. 15 W
ADC Resolution 10 bit
Extended Dynamic Range Up to 90 dB with activated Multi Slope Mode
Scan 3D Extraction Process MAX, TRSH, COG, FIR PEAK
High Dynamic Range Imaging Multi Slope Mode
3D Features Multipeak, Multipart, Region Tracking/Search, Autostart

Typical Profile Speed Depending on Number of Sensor Rows (Hz)

Frequently Asked Questions about the XCS Series

How much does a XCS 3D sensor cost?

The 3D sensors of the XCS series are optimized for demanding high-precision and high-speed applications requiring better than average repeatability. Their price starts at $17050.

Where can I find the data sheet for a product?

The data sheets for our products are linked via the item number in the tabular overview of our products in the product finder:

How much does an ECS 3D sensor cost?

The ECS series offers particularly good value for money, with sensors starting at a price of $6600.

Where can I find the latest firmware release for my 3d sensors?

You can find our AT SolutionPackage in the download area on our website:

What are the hardware requirements for operating the 3d sensors?

A network card that supports at least Gigabit Ethernet is required to operate the devices. A separate network port is recommended for each connected camera. The CPU and graphics card requirements depend on the application and are therefore specified by the image processing software used.

What do I need to bear in mind regarding the electrical installation for 3D sensors?

The electrical installation differs between cameras, compact sensors, and modular compact sensors. It is important to observe the specific information for the respective model to avoid damage to the device. We recommend using our IO panel.

What do I need to consider when using an encoder?

Profile recording can be synchronized by an external encoder signal. The encoder is specified for TTL levels and should not have signal levels above 5V DC, as higher voltages can damage the device.

The maximum number of lines is not enough to accommodate the entire object. What can I do to extend the frame?

Instead of extending the frame, you can split the recording into multiple frames without any loss of data. With the FrameBurstStart trigger, you can trigger multiple frames with a single start signal.

Can the 3D sensors communicate directly with a PLC?

The C6 series has two digital inputs and two digital outputs that can be connected to a PLC.

Are AT’s 3D sensors “smart 3D sensors”?

The term “smart sensor” generally refers to the evaluation of measurement data within the device itself. These sensors only transmit the results via their communication interfaces (e.g., Ethernet, Profinet, Modbus, or MQTT). AT’s 3D sensors, on the other hand, transmit the profile data to a PC via the GigE Vision interface. The data is then processed on the PC. AT 3D sensors are high-resolution, high-speed profile sensors. The amount of data generated by such sensors usually exceeds the performance capabilities of the CPUs built into cameras.

What is the warranty duration for the 3D sensors?

All CS, MCS and XCS series products are covered by a 2-year warranty, but the warranty for ECS products is only 1 year.

How do I know which 3D sensor is right for my application?

With our 25 years of expertise as component manufacturers in the field of 3D image processing, we have comprehensive knowledge in 3D laser triangulation sensor applications. Therefore, we can offer you optimal advice on which sensor is best for your application. Feel free to reach out to our sales team with confidence: [email protected].

How much does a MCS 3D sensor cost?

The costs naturally depend on the level of customization, but our sensors start at a price of $11220.

How much does a CS 3D sensor cost?

The CS series of 3D sensors offer a wide range of models for different applications and industries starting at a price of $11220.

How much does a XCS 3D sensor cost?

The 3D sensors of the XCS series are optimized for demanding high-precision and high-speed applications requiring better than average repeatability. Their price starts at $17050.

How much does a 3D camera cost?

The triangulation cameras are ideal for applications with 3D profile sensors requiring maximum flexibility and the use of customer-specific lenses and line projectors. They start at a price of $7150.

How do I configure my specific MCS?

Our sales team has a dedicated configurator for your specifications, allowing us to set it up together and generate the corresponding datasheet for you directly.

Do you have a quick start guide for your products?

You can find a summary of our quick start guides on our website.

Do AT devices support PoE?

No, our devices do not support PoE and may be damaged if connected to PoE.

Are you looking for more answers?
In our general FAQ, we have clearly compiled the most frequently asked questions about our sensors, cameras, interfaces, and applications.
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